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WebbWhen this spent slurry is recycled by a slurry recycling apparatus as described in the part of conventional art, about 12% of silicon dust remains in the spent slurry. Actually about … Webb1 jan. 2014 · Recycling abrasive slurry that has been used in chemical mechanical polishing (CMP) is one of the options for reducing the cost of manufacturing microchip processors. We use ultrafiltration which is a method of choice to recycle silica (SiO 2)-based slurry.Taking into account that the chemical composition of abrasive slurry plays … can a chauffeur\\u0027s license be used for an i9
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